Silicon Membranes

Membrane Products for
Electron Microscopy and Microanalysis

EQ Photonics offers a comprehensive range of MEMS membrane windows for transmission electron microscopy (TEM), scanning electron microscopy (SEM), X-ray analysis and related microanalysis applications. The portfolio covers five material systems — silicon nitride, silicon oxide, silicon carbide, silicon and tomography devices — each optimised for specific analytical requirements.

All membranes are fabricated in cleanroom conditions, individually packaged and optically inspected prior to delivery. Custom specifications are available on request.

Markets

• Science & Research
• Semiconductor Industry & Microelectronics
• Materials Science & Nanotechnology
• Biotechnology & Life Sciences
• Chemical & Pharma Industry
• Aerospace & Defence

Applications

• Transmission Electron Microscopy (TEM / HRTEM / STEM)
• Energy-Dispersive X-ray Spectroscopy (EDX)
• Electron Energy Loss Spectroscopy (EELS)
• X-ray Fluorescence (XRF) & X-ray Diffraction (XRD / SAXS)
• In-situ Electron Microscopy with Liquid Cells
• Correlative Light and Electron Microscopy (CLEM)
• Electron Tomography & 3D Reconstruction
• Nanoparticle Analysis & Filtration
• High-Throughput Sample Preparation

Features

• Five material systems: silicon nitride, silicon oxide, silicon carbide, silicon, tomography
• Membrane thicknesses from 5 nm — tailored per material and application
• Square and round (TEM) frame formats available
• Porous variants with micro- and nanopore patterns (silicon nitride)
• Multichip 3×3 array format for high-throughput workflows
• Single-crystal silicon membranes in (100), (110) and (111) orientations
• Tomography devices for 3D TEM reconstruction workflows
• Individually packaged in gel capsules — cleanroom quality

Benefits

• Material choice matched to contrast, thermal and chemical requirements
• Minimal background signal across all material systems
• High mechanical stability for robust handling and beam exposure
• Chemically inert to solvents, acids and plasma processes
• Compatible with all common TEM sample holders
• Ready to use — no pre-cleaning required
• Custom specifications available on request